Ve 415: Introduction to MEMS
Credits: 3 credits
Pre-requisites: Vv 216/256/286 and Vp 240
Course description: Micro-electro-mechanical systems (MEMS), devices, and technologies. Micro-machining and microfabrication techniques, including planar thin-film processing, silicon etching, wafer bonding, photolithography, deposition, and etching. Transduction mechanisms and modeling in different energy domains. Analysis of micromachined capacitive, piezoresistive, and thermal sensors/actuators and applications.