University of Michigan - Shanghai Jiao Tong University Joint Institute

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Ve 415: Introduction to MEMS


Credits: 3 credits
Pre-requisites: Vv 216/256/286 and Vp 240 
Course description: Micro-electro-mechanical systems (MEMS), devices, and technologies. Micro-machining and microfabrication techniques, including planar thin-film processing, silicon etching, wafer bonding, photolithography, deposition, and etching. Transduction mechanisms and modeling in different energy domains. Analysis of micromachined capacitive, piezoresistive, and thermal sensors/actuators and applications.